Bombardment of molecular solids with polyatomic projectiles allows interrogation of the sample with reduced chemical damage accumulation. Hence, it is now common to perform depth profiling experiments using a variety of substrates in a fashion similar to that reported for inorganic materials in use for many decades. The possibility for chemical processes, however, creates a number of fundamenta...

Composition depth profiling of HfO(2) (2.5 nm)/SiON (1.6 nm)/Si(001) was performed by three diffetent analytical techniques: high-resolution Rutherford backscattering spectroscopy (HRBS), angle-resolved X-ray photoelectron spectroscopy (AR-XPS) and high-resolution elastic recoil detection (HR-ERD). By comparing these results we found the following: (1) HRBS generally provides accurate depth pro...

A variety of analytical techniques have been developed and employed to characterize the surfaces, subsurfaces and interfaces of surface engineering systems. They provide important information for quality control, process optimization and further development. Since the mid 1980's, glow discharge spectrometry (GDS) has emerged as an important and versatile technique for rapid depth profiling anal...